Patent · US Active

Acoustically decoupled MEMS devices

US11777468B2 · kind B2 · utility

0Cited by

1References

30Claims

0Family size

Assignee

Georgia Tech Research Corporation · US

Inventors

Farrokh Ayazi · Atlanta, US
Benoit Hamelin · Atlanta, US
Jeremy Yi-Xiong Yang · New York, US

Key dates

Filing date	Mar 5, 2019
Grant date	Oct 3, 2023
Priority date	—
Expiry date	Nov 23, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH03H2009/0244
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

Embodiments of the present disclosure relate generally to acoustically decoupled microelectromechanical system devices and, more particularly, to acoustically decoupled microelectromechanical system devices anchored upon phononic crystals. In some embodiments described herein, a device may comprise a resonator, a handle layer, and a pedestal disposed between the resonator and the handle layer, the pedestal connecting the resonator to the handle layer. In the devices described herein, the resonator and the handle layer may be non-coplanar. In some embodiments, the handle layer comprises a phononic crystal to acoustically decouple the resonator from the substrate of the handle layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.