Substrate positioning for deposition machine
US11780242B2 · kind B2 · utility
0Cited by
4References
19Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 20, 2021 |
| Grant date | Oct 10, 2023 |
| Priority date | — |
| Expiry date | Oct 20, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/135
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A deposition device is described. The deposition device has a substrate support and an imaging system disposed to image a portion of a substrate positioned on the substrate support. The imaging system comprises an LED light source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.