Dual-diaphragm assembly having center constraint
US11780726B2 · kind B2 · utility
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68References
20Claims
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Key dates
| Filing date | Nov 3, 2021 |
| Grant date | Oct 10, 2023 |
| Priority date | — |
| Expiry date | Feb 16, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2201/003
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A MEMS diaphragm assembly comprises a first diaphragm, a second diaphragm, and a stationary electrode assembly spaced between the first and second diaphragms and including a plurality of apertures disposed therethrough. Each of a plurality of pillars is disposed through one of the plurality of apertures and connects the first and second diaphragms. At least one of the first and second diaphragms is connected to the stationary electrode assembly at a geometric center of the assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.