Corrosion tolerant micro-electromechanical fluid ejection device
US11787180B2 · kind B2 · utility
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Key dates
| Filing date | Apr 29, 2019 |
| Grant date | Oct 17, 2023 |
| Priority date | — |
| Expiry date | Nov 23, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/052
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A microfluidic device including a fluid ejection channel defined by a fluid barrier and an orifice, or nozzle, for containing and/or passing fluids, and further including micro-electromechanical systems (MEMS) and/or electronic circuitry may be fabricated on a silicon substrate and included in a fluid ejection system. Various microfabrication techniques used for fabricating semiconductor devices may be used to manufacture such microfluidic devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.