Discrete and monolithic phase-change material (PCM) radio frequency (RF) switches with sheet of thermally conductive and electrically insulating material
US11793096B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Jan 13, 2021 |
| Grant date | Oct 17, 2023 |
| Priority date | — |
| Expiry date | Feb 5, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N70/8828
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A radio frequency (RF) device includes a phase-change material (PCM) situated over a sheet of thermally conductive and electrically insulating material, a heating element situated under the sheet of thermally conductive and electrically insulating material, and an input/output terminal situated over the PCM. The heating element is situated in a dielectric. A heat spreader is situated under the dielectric and over a substrate. Metal interconnect layers can be situated under and/or over the PCM, with the substrate situated below the metal interconnect layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.