Scanning mirror systems and methods of manufacture
US11796791B2 · kind B2 · utility
2Cited by
10References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 15, 2021 |
| Grant date | Oct 24, 2023 |
| Priority date | — |
| Expiry date | Jan 22, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/0172
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Described are scanning micromirror devices, methods of making scanning micromirror devices, two-dimensional optical scanning systems that incorporate scanning micromirror devices, and methods of projecting light and images using two-dimensional optical scanning systems. The disclosed two-dimensional optical scanning systems can incorporate a first scanning micromirror device oscillating at a relatively higher frequency, which directs reflected light onto a second scanning micromirror device oscillating at a relatively lower frequency, which directs reflected light for projection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.