Patent · US Active

Nanometric electromechanical actuator and method of manufacturing the same

US11799396B2 · kind B2 · utility

0Cited by

3References

12Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Louis HUTIN · Grenoble, FR
Giulia Usai · Grenoble, FR

Key dates

Filing date	Jul 14, 2021
Grant date	Oct 24, 2023
Priority date	—
Expiry date	Dec 6, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01H1/0036
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A method for manufacturing an electromechanical actuator includes providing a primary stack of layers comprising a monocrystalline layer, providing a secondary stack of layers, and forming, in the etching layer, at least three pads. The method further includes encapsulating the three pads by a first encapsulation layer, assembling the primary stack of layers with the secondary stack of layers, removing the first substrate, and forming a movable electrode in the monocrystalline layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.