Digitally tunable acoustic wave resonators
US11799448B2 · kind B2 · utility
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Key dates
| Filing date | Feb 11, 2021 |
| Grant date | Oct 24, 2023 |
| Priority date | — |
| Expiry date | Mar 24, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02196
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A digitally tunable acoustic wave resonator includes, in part, a first electrode positioned above a substrate, a composite stack positioned above the first electrode, and a second electrode positioned above the composite stack. The composite stack may include one or more alternate layers of a ferroelectric layer and a transition-metal nitride layer. The transition-metal nitride layer can be positioned above the ferroelectric layer, except the ferroelectric layer at the top of the composite stack. The ferroelectric layer comprises an aluminum scandium nitride layer Al1-xScxN, where 0<x<1.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.