Patent · US Active

MEMS transducer with improved performance

US11800294B2 · kind B2 · utility

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20Claims

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Assignee

Hahn-Schickard-Gesellschaft für Angewandte Forschung e. V. · DE

Inventors

Alfons Dehe · Reutlingen, DE
Achim Bittner · Heilbronn, DE
Lenny Castellanos · Oberndorf am Neckar, DE

Key dates

Filing date	Jan 15, 2021
Grant date	Oct 24, 2023
Priority date	—
Expiry date	Jan 15, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2201/003
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

The invention relates to a MEMS transducer comprising a vibratable membrane for generating or receiving pressure waves in a fluid in a vertical direction, wherein the vibratable membrane is supported by a carrier and the vibratable membrane exhibits two or more vertical sections which are formed parallel to the vertical direction and comprise at least one layer of actuator material. The end of the vibratable membrane is preferably connected to an electrode, such that the two or more vertical sections can be induced to vibrate horizontally by driving the at least one electrode, or such that an electrical signal can be generated at the at least one electrode when the two or more vertical sections are induced to vibrate horizontally.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.