Dielectric layers for digital microfluidic devices
US11801510B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2022 |
| Grant date | Oct 31, 2023 |
| Priority date | — |
| Expiry date | Dec 16, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2300/08
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An electrowetting system is disclosed. The system includes electrodes configured to manipulate droplets of fluid in a microfluidic space. Each electrode is coupled to circuitry operative to selectively apply a driving voltage to the electrode. The system includes a dielectric stack including a first dielectric pair comprising a first layer having a first dielectric constant and a second layer having a second dielectric constant. The second dielectric constant is larger than the first dielectric constant. The dielectric stack includes a second dielectric pair comprising a third layer having a third dielectric constant and a fourth layer having a fourth dielectric constant. The fourth dielectric constant is larger than the third dielectric constant. A ratio of a thickness of the fourth layer to a thickness of the third layer (T4:T3) is in the range from about 2:1 to about 8:1. The second dielectric pair is thinner than the first dielectric pair.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.