Transfer apparatus
US11801629B2 · kind B2 · utility
0Cited by
1References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 25, 2018 |
| Grant date | Oct 31, 2023 |
| Priority date | — |
| Expiry date | Nov 28, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29C2033/725
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
According to one embodiment, a transfer apparatus includes a coating part for coating an uncured resin on a substrate, a substrate installation part for positioning and installing the substrate integrally, a mold installation part for installing a sheet-like mold, a transfer roller for transferring a fine transfer pattern formed on the mold to the resin coated on the substrate, and a plasma unit for cleaning the mold by irradiating plasma to the mold peeled off from the resin after transferring. After cleaning by the plasma using the plasma unit, the cleaned mold is used again for transferring of the transfer pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.