System for precision displacement measurement based on self-traceable grating interference
US11802758B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 27, 2022 |
| Grant date | Oct 31, 2023 |
| Priority date | — |
| Expiry date | Jan 30, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for precision displacement measurement based on a self-traceable grating interference includes a coherent light source, a photoelectric detection module, a self-traceable grating and a signal processing module. The self-traceable grating is arranged on a to-be-measured displacement motion platform. The coherent light source, the photoelectric detection module and the signal processing module are sequentially connected. Laser generated by the coherent light source propagates through the photoelectric detection module and is incident on the self-traceable grating, diffracts with the self-traceable grating, returns to the photoelectric detection module to continue propagating and enters the signal processing module. The signal processing module collects an interference signal to obtain a motion displacement and a motion direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.