Apparatus for manufacturing display device, method of manufacturing mask assembly, and method of manufacturing display device
US11807933B2 · kind B2 · utility
0Cited by
3References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 14, 2021 |
| Grant date | Nov 7, 2023 |
| Priority date | — |
| Expiry date | Jan 28, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/231
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for manufacturing a display device includes a mask assembly, the mask assembly including a silicon substrate having a first surface, a second surface opposite the first surface, and a first opening portion penetrating the first surface and the second surface, and a support substrate on the second surface, the support substrate having a second opening portion connected to the first opening portion. The first opening portion at the first surface is less in width than the first opening portion at the second surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.