X-ray analyzer and X-ray analysis method
US11808718B2 · kind B2 · utility
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Key dates
| Filing date | Nov 8, 2021 |
| Grant date | Nov 7, 2023 |
| Priority date | — |
| Expiry date | Nov 29, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/046
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An X-ray analyzer has a configuration including an X-ray source, an X-ray detector configured to detect an X-ray irradiated from the X-ray source, a rotary stage (stage) disposed between the X-ray source and the X-ray detector, and configured to hold an imaging target, and a light irradiation mechanism configured to irradiate light coaxially with an X-ray optical axis of the X-ray irradiated from the X-ray source to project a shadow of the imaging target onto a position of the X-ray detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.