Semiconductor device reliability evaluation apparatus and semiconductor device reliability evaluation method
US11808801B2 · kind B2 · utility
1Cited by
3References
14Claims
0Family size
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Key dates
| Filing date | Apr 19, 2019 |
| Grant date | Nov 7, 2023 |
| Priority date | — |
| Expiry date | Mar 15, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/317
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A direct-current power supply applies a DC voltage to test semiconductor devices. A current detection unit detects a leakage current of a test circuit in which test semiconductor devices are included. A measuring instrument records a pulse waveform of the leakage current. An analyzer analyzes reliability of test semiconductor devices included in the test circuit based on the recorded pulse waveform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.