Ultra-compact silicon waveguide mode converter based on meta-surface structure

US11808980B2 · kind B2 · utility

Assignee

• Shanghai Jiao Tong University · CN

Inventors

• Hongwei Wang · Suzhou, CN
• Yong Zhang · Carmel, US
• Yu He · Beijing, CN
• Lu Sun · Shanghai, CN
• Yikai Su · Eatontown, US

Key dates

• Filing date: Jun 25, 2019
• Grant date: Nov 7, 2023
• Expiry date: Nov 23, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B2006/12152
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A compact silicon waveguide mode converter, a dielectric meta-surface structure based on periodical oblique subwavelength perturbations, including a top silicon structure with oblique subwavelength perturbations etched in certain periods with period length of Λ, a duty cycle and an oblique angle θ on the SOI substrate. The invention adopts an all-dielectric meta-surface structure with oblique subwavelength perturbation, which can achieve a compact mode conversion from fundamental mode to arbitrary high-order mode of silicon waveguide, and can improve the optical communication capacity greatly.