Alignment method and tools
US11809011B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 13, 2021 |
| Grant date | Nov 7, 2023 |
| Priority date | — |
| Expiry date | Apr 26, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/1643
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A laser system includes a first laser cavity to output a laser light along a first path, a first mirror to receive the laser light from the first laser cavity, and redirect the laser light along a second path that is different than the first path, a second mirror to receive the laser light from the first mirror, and redirect the laser light along a third path that is different than the first path and the second path, a beam splitter located at a first position on the third path, a beam combiner located at a second position on the third path; and a coupling lens assembly, the coupling lens assembly including a lens located at a third position on the third path, wherein the coupling lens assembly moves the lens in x-, y-, and x-directions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.