Process manufacturing method, method for adjusting threshold voltage device, and storage medium
US11809802B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 11, 2021 |
| Grant date | Nov 7, 2023 |
| Priority date | — |
| Expiry date | Jul 2, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/017
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A process manufacturing method, a method for adjusting a threshold voltage, a device, and a storage medium are provided. One form of a process manufacturing method includes: determining a type of to-be-formed MOS device and a corresponding threshold voltage interval; obtaining, according to a MOS device type and the corresponding threshold voltage interval, a corresponding threshold voltage adjustment process by querying a pre-configured first mapping relationship of the threshold voltage interval and a second mapping relationship of the threshold voltage interval; and establishing a process flow according to the corresponding threshold voltage adjustment process, the first mapping relationship being a mapping relationship between the threshold voltage interval and the MOS device type; and the second mapping relationship being a correspondence between the threshold voltage interval in the first mapping relationship and a threshold voltage adjustment process formed by at least one adjustment process selected from a preset process flow, the threshold voltage adjustment process causing a threshold voltage to be in the corresponding threshold voltage interval under the action of a tota…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.