Decoupled transversely-excited film bulk acoustic resonators
US11811386B2 · kind B2 · utility
2Cited by
83References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 9, 2021 |
| Grant date | Nov 7, 2023 |
| Priority date | — |
| Expiry date | Jan 14, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/0442
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate and a piezoelectric plate supported by the substrate. A portion of the piezoelectric plate suspended across a cavity in the substrate forms a diaphragm. A decoupling dielectric layer is on a front surface of the diaphragm. An interdigital transducer (IDT) has interleaved fingers on the decoupling dielectric layer over the diaphragm. The IDT and piezoelectric plate are configured such that a radio frequency signal applied to the IDT excites shear acoustic waves in the diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.