Patent · US Active

Nanoscale scanning sensors

US11815528B2 · kind B2 · utility

0Cited by
6References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 18, 2022
Grant dateNov 14, 2023
Priority date
Expiry dateFeb 18, 2042

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R33/323
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A sensing probe may be formed of a diamond material comprising one or more spin defects that are configured to emit fluorescent light and are located no more than 50 nm from a sensing surface of the sensing probe. The sensing probe may include an optical outcoupling structure formed by the diamond material and configured to optically guide the fluorescent light toward an output end of the optical outcoupling structure. An optical detector may detect the fluorescent light that is emitted from the spin defects and that exits through the output end of the optical outcoupling structure after being optically guided therethrough. A mounting system may hold the sensing probe and control a distance between the sensing surface of the sensing probe and a surface of a sample while permitting relative motion between the sensing surface and the sample surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.