Detection system for X-ray inspection of an object

US11817231B2 · kind B2 · utility

Assignees

• Carl Zeiss SMT GmbH · DE
• CARL ZEISS X-RAY MICROSCOPY, INC. · US

Inventors

• Johannes Ruoff · Aalen, DE
• Juan Atkinson Mora · Hillsboro, US
• Thomas A. Case · Walnut Creek, US
• Heiko Feldmann · Aalen, DE
• Christoph Graf Vom Hagen · Oakland, US
• Thomas Matthew Gregorich · San Diego, US
• Gerhard Krampert · Jena, DE

Key dates

• Filing date: Aug 16, 2021
• Grant date: Nov 14, 2023
• Expiry date: Aug 16, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2223/505
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A detection system serves for X-ray inspection of an object. An imaging optical arrangement serves to image the object in an object plane illuminated by X-rays generated by an X-ray source. The imaging optical arrangement comprises an imaging optics to image a transfer field in a field plane into a detection field in a detection plane. A detection array is arranged at the detection field. An object mount holds the object to be imaged and is movable relative to the X-ray source via an object displacement drive along at least one lateral object displacement direction in the object plane. A shield stop with a transmissive shield stop aperture is arranged in an arrangement plane in a light path and is movable via a shield stop displacement drive in the arrangement plane. A control device has a drive control unit, which is in signal connection with the shield stop displacement drive and with the object displacement drive for synchronizing a movement of the shield stop displacement drive and the object displacement drive. The result is an optimization of an X-ray illumination of the object to achieve a high-resolution object imaging.