Array substrate, digital x-ray detector including the same, and method for manufacturing the same
US11817519B2 · kind B2 · utility
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18Claims
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Key dates
| Filing date | Nov 24, 2021 |
| Grant date | Nov 14, 2023 |
| Priority date | — |
| Expiry date | Nov 24, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K39/36
Abstract
A lower electrode of a PIN diode and a second protective layer covering the PIN diode are formed not using separate mask processes, but using the same mask process using the same mask, thereby reducing the number of mask processes and thus increasing process efficiency. Further, the lower electrode of the PIN diode is patterned and then the second protective film covering the PIN diode is patterned such that both the former patterning and the latter patterning are carried out using a single mask process, thereby reduce increase in defects due to foreign materials or stains.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.