Elastic wave device
US11817847B2 · kind B2 · utility
1Cited by
6References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 5, 2018 |
| Grant date | Nov 14, 2023 |
| Priority date | — |
| Expiry date | Sep 15, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/145
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An elastic wave device includes a piezoelectric substrate, an interdigital transducer electrode on the piezoelectric substrate, a support on the piezoelectric substrate, including a cavity, and surrounding the interdigital transducer electrode at the cavity, a cover covering the cavity and provided on the support, and a via hole electrode penetrating the cover and the support. The via hole electrode includes a projection portion projecting outward from a side surface portion when seen in a plan view. The projection portion is located within the cover.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.