Thin free-standing oxide membranes

US11821081B2 · kind B2 · utility

Assignee

• The Regents of the University of California · US

Inventors

• Yi Hsien Lu · Yuanchang, TW
• Xiao Zhao · El Cerrito, US
• Matthijs van Spronsen · Berkeley, US
• Adam Schwartzberg · Santa Cruz, US
• Miquel Salmeron · Kensington, US
• Carlos Morales Sanchez · Cottbus - Chóśebuz, DE

Key dates

• Filing date: Oct 4, 2021
• Grant date: Nov 21, 2023
• Expiry date: Oct 4, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q60/366
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

This disclosure provides systems, methods, and apparatus related to thin free-standing oxide membranes. In one aspect, a method includes providing a substrate. The substrate defines a hole having a diameter of about 500 nanometers to 5000 nanometers. A layer of metal is deposited on the substrate. A supporting layer is deposited on the layer of metal. A first side of the supporting layer is the side that is disposed on the layer of metal. A metal oxide layer is deposited on the first side of the supporting layer and on the substrate. In some implementations, the method further includes removing the supporting layer.