Patent · US Active

Mass flow sensor assembly and method of manufacturing a mass flow sensor assembly

US11821776B2 · kind B2 · utility

0Cited by

4References

14Claims

0Family size

Assignees

BUERKERT WERKE Gmbh & CO. KG · DE
BURKERT S.A.S. · FR

Inventors

Andreas Doerr · Stuttgart, DE
Tanja Hertweck · Ingelfingen, DE
Jan Magnussen · Ingelfingen, DE
Juergen Wiedemann · Ingelfingen, DE
Armin Arnold · Pyrbaum, DE
Frederic Heinrich · Ingelfingen, DE

Key dates

Filing date	May 22, 2020
Grant date	Nov 21, 2023
Priority date	—
Expiry date	Dec 12, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG01F1/86
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A mass flow sensor assembly for a mass flow controller or a mass flow meter comprises a mass flow sensor comprising a capillary tube held by a first corner support and a second corner support formed separately from each other. The capillary tube comprises a sensor portion which is located between the two corner supports, and wherein the two corner supports each have an arc-shaped groove in which the capillary tube is partially received. In addition, a method of manufacturing a mass flow sensor assembly is described.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.