Methods of producing augmented probe system images and associated probe systems
US11821912B2 · kind B2 · utility
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22Claims
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Key dates
| Filing date | May 6, 2021 |
| Grant date | Nov 21, 2023 |
| Priority date | — |
| Expiry date | Jul 8, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2891
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods of producing augmented probe system images and associated probe systems. A method of producing an augmented probe system image includes recording a base probe system image, generating the augmented probe system image at least partially based on the base probe system image, and presenting the augmented probe system image. The augmented probe system image includes a representation of at least a portion of the probe system that is obscured in the base probe system image. In some examples, a probe system includes a chuck, a probe assembly, an imaging device, and a controller programmed to perform methods disclosed herein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.