Apparatus and method for solvent vapour annealing of a block copolymer
US11823902B2 · kind B2 · utility
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3References
20Claims
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Assignee
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Key dates
| Filing date | Mar 19, 2019 |
| Grant date | Nov 21, 2023 |
| Priority date | — |
| Expiry date | Apr 24, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/26
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus and method which may be used for fabricating nanoscale devices are disclosed. The apparatus comprises measurement means configured to measure swelling of a block copolymer during solvent vapour annealing of the block copolymer. The apparatus also comprises temperature control means configured to receive a control signal indicative of the swelling of the block copolymer. The temperature control means can then control the temperature of the block copolymer as indicated by the control signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.