Multi-shield plate and control system
US11823919B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 13, 2022 |
| Grant date | Nov 21, 2023 |
| Priority date | — |
| Expiry date | Jul 13, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multi-shield plate includes a plurality of windows and a plurality of vapor shields mounted to the plurality of windows, wherein each window of the plurality of windows is formed in the plate and extends through an entirety of the plate in a thickness direction. The multi-shield plate further includes a plurality of apertures in the plate, wherein each of the plurality of apertures extends through the entirety of the plate in the thickness direction and, an aperture of the plurality of apertures is aligned with a corresponding window of the plurality of windows along radius of the multi-shield plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.