Vibration substrate having a pair of holding portions and a beam portion connecting the holding portions, vibrator, and vibrator unit
US11824521B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 27, 2020 |
| Grant date | Nov 21, 2023 |
| Priority date | — |
| Expiry date | Aug 31, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/177
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
The vibration substrate having a main surface extending parallel to a first direction and a second direction that are orthogonal to each other, and that includes a main body region having a vibrating portion at least in a part thereof and at least one holding region arranged side by side with the main body region along the first direction. The at least one holding region including a holding portion and a beam portion connecting the holding portion and the main body region. The beam portion includes a first arm portion extending from the holding portion along the first direction, a second arm portion extending along the second direction from an end portion of the first arm portion on a side thereof opposite to the holding portion, and a connection portion connecting the second arm portion and the main body region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.