Apparatus and process for determining the distance between a glass substrate and a coater
US11827983B2 · kind B2 · utility
0Cited by
7References
17Claims
0Family size
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Key dates
| Filing date | Feb 14, 2020 |
| Grant date | Nov 28, 2023 |
| Priority date | — |
| Expiry date | Aug 7, 2040 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/152
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A combination of a chemical vapour deposition (CVD) coater and at least one capacitive proximity sensor, comprising: a CVD coater, and at least one capacitive proximity sensor attached to the CVD coater, wherein the at least one capacitive proximity sensor is arranged to determine the distance between a glass substrate and the CVD coater.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.