Integrated circuit device
US11830567B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 12, 2021 |
| Grant date | Nov 28, 2023 |
| Priority date | — |
| Expiry date | Feb 1, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/76805
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An integrated circuit device includes; word lines extending in a first direction across a substrate and spaced apart in a second direction different from the first direction, bit lines extending on the word lines in the second direction and spaced apart in the first direction, a first contact plug arranged among the bitlines, contacting a first active region of the substrate, having a first width, and having a first dopant concentration, and a second contact plug arranged among the bitlines, contacting a second active region of the substrate, having a second width, and having a second dopant concentration less than the first dopant concentration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.