Grid structure
US11830702B2 · kind B2 · utility
0Cited by
4References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 30, 2021 |
| Grant date | Nov 28, 2023 |
| Priority date | — |
| Expiry date | Nov 22, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2802
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Embodiments of the present disclosure provide a grid structure. The grid structure includes a carrier and a support column; wherein the support column is located on the carrier, the support column has a top surface for supporting a sample; and the support column has a groove, the groove extends along a direction from the top surface to the carrier, and a groove wall of the groove is connected to the top surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.