RF switch device
US11830923B2 · kind B2 · utility
0Cited by
1References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 11, 2022 |
| Grant date | Nov 28, 2023 |
| Priority date | — |
| Expiry date | Apr 11, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L23/528
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed is an RF switch device and, more particularly, an RF switch device having an air gap over a gate electrode and a metal interconnect at a position higher than the air gap and that at least partially overlap the air gap in the vertical direction, thereby preventing exposure of an upper portion of the air gap in subsequent processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.