Short-travel nanoscale motion stage and method for measuring thermally-related hysteresis data
US11831256B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 22, 2022 |
| Grant date | Nov 28, 2023 |
| Priority date | — |
| Expiry date | Apr 10, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N2/023
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A short-travel nanoscale motion stage and a method for measuring thermally-related hysteresis data are provided. A stator unit of a left two-pole electromagnet and stator units of two inchworm motors are fixed on a right side surface of a left foundation frame, and an active unit of the left two-pole electromagnet and actives of the two inchworm motors are fixed on a left side surface of a stage moving component. An active unit of a right two-pole electromagnet is fixed on a right side surface of the stage moving component, while a stator unit of the right two-pole electromagnet is fixed on a left side surface of a right foundation frame. The stage moving component is fixedly mounted on a guide sleeve of an aerostatic guideway. Each of the stator units of the left and right two-pole electromagnets has an eddy current sensor and a hall sensor fixed therein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.