Transversely-excited film bulk acoustic resonator with reduced spurious modes
US11831289B2 · kind B2 · utility
0Cited by
60References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 17, 2021 |
| Grant date | Nov 28, 2023 |
| Priority date | — |
| Expiry date | Nov 24, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/0442
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic filters, resonators and methods are disclosed. An acoustic resonator device includes a piezoelectric plate forming a diaphragm and a conductor pattern formed on the piezoelectric plate, the conductor pattern including an interdigital transducer (IDT). Interleaved fingers of the IDT are on the diaphragm. A ratio of the mark of the interleaved fingers to a pitch of the interleaved fingers is greater than or equal to 0.2 and less than or equal to 0.3.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.