Piezoelectric transducer
US11832522B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2021 |
| Grant date | Nov 28, 2023 |
| Priority date | — |
| Expiry date | Aug 2, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/073
Abstract
A piezoelectric transducer includes beam portions each with a fixed end portion and extending in a direction away from the fixed end portion. A base portion is connected to the fixed end portion of each of the beam portions. The beam portions extends in a same plane, and respective extending directions of at least two beam portions are different from each other. The beam portions each include a single crystal piezoelectric layer having a polarization axis in a same direction, an upper electrode layer, and a lower electrode layer. A polarization axis has a polarization component in the plane. An axial direction of an orthogonal axis that is orthogonal to the polarization axis and extends in the above-described plane intersects with an extending direction of each of the plurality of beam portions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.