Active gas generating apparatus
US11839014B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 27, 2019 |
| Grant date | Dec 5, 2023 |
| Priority date | — |
| Expiry date | Aug 9, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32541
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In the present invention, an electrode pair having a discharge space therein is constituted by a combination of a high-voltage application electrode unit and a ground potential electrode unit. The high-voltage application electrode unit has, as the main components, an electrode dielectric film and a metal electrode formed on the upper surface of the electrode dielectric film. An auxiliary conductive film is formed in an annular shape so as to surround the metal electrode without overlapping the metal electrode in plan view. A metal electrode pressing member: has an annular shape in plan view; is provided to contact part of the upper surface of the auxiliary conductive film; and is fixed to a metal base flange. A ground potential is applied to the base flange.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.