Patent · US Active

MEMS sensor including a diaphragm and method for manufacturing a MEMS sensor

US11840445B2 · kind B2 · utility

0Cited by

1References

12Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Christoph Hermes · Kirchentellinsfurt, DE
Kerrin Doessel · Stuttgart, DE
Thomas Friedrich · Bietigheim-Bissingen, DE

Key dates

Filing date	Dec 17, 2019
Grant date	Dec 12, 2023
Priority date	—
Expiry date	Nov 28, 2040

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/04
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A MEMS sensor including a diaphragm, a base surface area of the diaphragm being delimited with the aid of a peripheral wall structure, and the base surface area including at least two subareas, of which at least one of the subareas is deflectably situated, and the at least two subareas being separated from one another with the aid of at least one separating structure or being delimited by the latter. The separating structure includes at least one fluid through-opening for the passage of fluid.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.