Pressure sensor with improved diaphragm seal

US11841283B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Lars Sodan · Reutlingen, DE
• Dorothee Nonnenmacher · Echterdingen, DE
• Elmar Kroner · Tamm, DE
• Friedhelm Guenter · Burgstetten, DE
• Joachim Friedl · Reutlingen, DE
• Joachin Kreutzer · Reutlingen, DE
• Klaus-Volker Schuett · Wernau, DE
• Michael Raedler · Hamburg, DE
• Patrick Stihler · Schlaitdorf, DE
• Raschid Baraki · Reutlingen, DE
• Steven Maul · Leonberg, DE
• Yang Zou · Renningen, DE

Key dates

• Filing date: Nov 12, 2021
• Grant date: Dec 12, 2023
• Expiry date: Nov 12, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L19/142
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for manufacturing a sensor. The sensor includes a sensing element and a housing, the housing including an interior space, which is accessible through a housing opening, and the sensing element being situated in the interior space and being designed to detect a property and/or a composition of an ambient medium of the sensor. The method includes filling the interior space with a protective medium through the housing opening, the protective medium being designed to transfer the property and/or the composition of the ambient medium to the sensing element; fixing a preferably flexible diaphragm at or in the housing opening preferably for sealing the housing opening, the diaphragm including at least one diaphragm opening; and sealing the at least one diaphragm opening. A sensor, which is manufactured according to this method, is also described.