Fine particle sensor with cascaded microscales
US11841306B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 30, 2019 |
| Grant date | Dec 12, 2023 |
| Priority date | — |
| Expiry date | Jul 13, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/0261
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor for the continuous in-situ analysis of an aerosol flow for measuring the mass of the micron/submicron particles suspended in the air flow, including an aeraulic sorter allowing the particles to be sorted according to their size with an impactor body with a cascade of one or more stages; at least one MEMS microbalance per stage, with an oscillating silicon membrane located on the impaction zone of the particles; processor connected to each MEMS microbalance to determine the mass of all the particles on the impaction zone; a system for cleaning the MEMS microbalances allowing the evacuation of the particles from the MEMS microbalances; means for driving the aerosol flow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.