Sensor substrate and method of producing the sensor substrate
US11841323B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 22, 2020 |
| Grant date | Dec 12, 2023 |
| Priority date | — |
| Expiry date | Jul 25, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure provides a sensor substrate that detects an analyte of a low concentration with high sensitivity and high reliability. The sensor substrate according to the present disclosure a first substrate having first microprotrusions provided on the surface thereof and covered by a metal film, an adhesive film disposed on the surface of the first substrate and having a slit, and a second substrate that is transparent, disposed on the adhesive film, and having a first through hole and a second through hole, wherein each of the first through hole and the second through hole is in communication with the slit, and the first microprotrusions overlap the slit in a plan view.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.