Acoustic resonator

US11843364B2 · kind B2 · utility

Assignees

• II-VI DELAWARE, INC. · US
• University of South Florida · US

Inventors

• Wen-Qing Xu · Sarver, US
• Di Lan · Tampa, US
• Jing Wang · Tampa, US
• Weiqi Li · San Jose, US
• Xu Han · Beijing, CN
• Chao Liu · Butler, US
• Elgin E. Eissler · Renfrew, US
• Giovanni Barbarossa · Saratoga, US

Key dates

• Filing date: Nov 26, 2021
• Grant date: Dec 12, 2023
• Expiry date: Nov 26, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H03H9/175
• WIPO field: Basic communication processes
• WIPO sector: Electrical engineering

Abstract

An acoustic resonator includes a piezoelectric stack including a piezoelectric layer having a top surface and a bottom surface, a top electrode layer disposed above the top surface, and a bottom electrode layer disposed below the bottom surface. A number of acoustic wave reflectors are disposed on a side of the bottom electrode layer opposite the piezoelectric layer. Each acoustic wave reflector includes a high acoustic impedance layer and may include a low acoustic impedance layer. The acoustic resonator may include a tether that extends laterally to a stacking direction of the layers of the piezoelectric stack. A supporting structure may be coupled to the tether opposite the acoustic resonator for anchoring the acoustic resonator. A mirror, one or more phononic crystals, or both may be positioned on proximate the tether opposite the acoustic resonator to avoid resonant waves from exiting the acoustic resonator in use.