Bulk-acoustic wave resonator
US11843365B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 8, 2021 |
| Grant date | Dec 12, 2023 |
| Priority date | — |
| Expiry date | Feb 26, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/174
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A bulk-acoustic wave resonator includes a resonator including a central portion in which a first electrode, a piezoelectric layer, and a second electrode are sequentially stacked on a substrate, and an extension portion disposed along a periphery of the central portion; and an insertion layer disposed between the piezoelectric layer and the substrate in the extension portion to raise the piezoelectric layer. The insertion layer includes a first insertion layer having a first inclined surface formed along a side surface facing the central portion and a second inclined surface disposed between the first insertion layer and the piezoelectric layer and having a second inclined surface spaced apart from the first inclined surface with respect to a surface direction of the first electrode. The first insertion layer is thinner than the second insertion layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.