Piezoelectric device
US11844281B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 21, 2021 |
| Grant date | Dec 12, 2023 |
| Priority date | — |
| Expiry date | Aug 25, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/87
Abstract
A piezoelectric device includes a base portion and a membrane portion. The membrane portion is indirectly supported by the base portion, and is located on the upper side relative to the base portion. The membrane portion includes a plurality of layers. The membrane portion does not overlap with the base portion, and includes a single crystal piezoelectric layer, an upper electrode layer, and a lower electrode layer. The membrane portion is provided with a through-groove penetrating in the up-down direction. The through-groove includes a first step portion provided in the thickest layer among the plurality of layers defining the membrane portion. The width of the through-groove is narrower on a lower side than on an upper side with the first step portion as a boundary.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.