Apparatus and method for wavefront reconstruction based on rotationally symmetric extended structured light illumination
US11846558B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 20, 2020 |
| Grant date | Dec 19, 2023 |
| Priority date | — |
| Expiry date | Nov 4, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/126
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure provides an apparatus and method for wavefront reconstruction based on rotationally symmetric extended structured light illumination. The apparatus includes a laser device, a neutral density filter, a microscope objective, a pinhole, a collimating lens, a beam splitter prism, a spatial light modulator, a lens to be measured, and an image acquisition device that are sequentially arranged. The method permits modulation of incident parallel light into phase grating-like structured light by using a spatial light modulator. Based on the characteristic of non-infinitely small pixel unit of the spatial light modulator, changing the modulation pattern of the spatial light modulator may result in different forms of structured light. Not only the object to be measured but also the real structured light wavefront can be recovered by acquiring diffraction spots at the focal plane and simultaneously updating the object plane and the structured light plane using an algorithm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.