Apparatus for detecting slurry spread volume using terahertz wave, spread system and detecting method using the same
US11846584B2 · kind B2 · utility
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Key dates
| Filing date | Nov 17, 2020 |
| Grant date | Dec 19, 2023 |
| Priority date | — |
| Expiry date | Nov 28, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8663
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A measurement apparatus for measuring a coating amount of a slurry according to the present disclosure includes a light emitter configured to irradiate terahertz wave onto a release paper coated with the slurry, a light receiver configured to receive the terahertz wave, which is irradiated from the light emitter and passes through the release paper coated with the slurry, to obtain a power of the terahertz wave, and a calculating part configured to calculate a thickness of an electrode, formed from the slurry applied to the release paper, based on the power of the terahertz wave received by the light receiver.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.