Methods for manufacturing high-density neural probes having various forms
US11846882B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 8, 2020 |
| Grant date | Dec 19, 2023 |
| Priority date | — |
| Expiry date | Jun 24, 2042 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61B2562/125
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
Disclosed is a method for manufacturing a high-density neural probe including needles having various forms. The method, in which only a photolithography process and an etching process are used, simplifies a manufacturing process of the neural probe, minimizes changes in the characteristics of the neural probe depending on process equipment or conditions, and may thus ensure a high yield, thereby being advantageous in terms of commercialization. In addition, various forms of needles may be manufactured depending on the shape of patterns included in a mask, the height of the needles may be controlled by adjusting the size of the patterns and the gap between the patterns, and thereby, a neural probe having a plurality of needles having different heights may be manufactured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.