Method for sealing entries in a MEMS element

US11851324B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Christoph Hermes · Kirchentellinsfurt, DE
• Hans Artmann · Magstadt, DE
• Heribert Weber · Leverkusen, DE
• Peter Schmollngruber · Aidlingen, DE
• Thomas Friedrich · Bietigheim-Bissingen, DE
• Tobias Joachim Menold · Weil der Stadt, DE
• Mawuli Ametowobla · Stuttgart, DE

Key dates

• Filing date: Dec 13, 2019
• Grant date: Dec 26, 2023
• Expiry date: Oct 18, 2040

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2203/0145
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A method for sealing entries in a MEMS element. The method includes: providing a functional layer having a functional region; producing a cavity underneath the functional region of the functional layer with the aid of a first entry outside of the functional region of the functional layer; sealing the first entry; producing a second entry to the cavity outside of the functional region of the functional layer; melting sealing material in the region of the second entry; and cooling off the melted sealing material to seal the second entry.