Multispectral photodetector array
US11852536B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 11, 2019 |
| Grant date | Dec 26, 2023 |
| Priority date | — |
| Expiry date | Jan 9, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2005/345
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A photodetector array comprising at least one first sensor and at least one second sensor on the horizontal surface of the array substrate. The at least one first sensor is sensitive to radiation in a first wavelength range which comprises long-wavelength infrared wavelengths, and the at least one second sensor is sensitive to radiation in a second wavelength range which comprises wavelengths shorter than long-wavelength infrared. The array substrate comprises a vertical cavity on its horizontal surface, and the first sensor comprises a layer of pyroelectric material (65) which extends horizontally across the vertical cavity in the first area. A first part of a layer of two-dimensional layered material at least partly covers the layer of pyroelectric material (65), and a second part of the layer of two-dimensional layered material at least partly covers the foundation of the second sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.