Lens adjustment for an edge exposure tool
US11852979B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2022 |
| Grant date | Dec 26, 2023 |
| Priority date | — |
| Expiry date | Jun 29, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/203
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An edge exposure tool may include a lens adjustment device that is capable of automatically adjusting various parameters of an edge exposure lens to account for changes in operating parameters of the edge exposure tool. In some implementations, the edge exposure tool may also include a controller that is capable of determining edge adjustment parameters for the edge exposure lens and exposure control parameters for the edge exposure tool using techniques such as big data mining, machine learning, and neural network processing. The lens adjustment device and the controller are capable of reducing and/or preventing the performance of the edge exposure tool from drifting out of tolerance, which may maintain the operation performance of the edge exposure tool and reduce the likelihood of wafer scratching, and may reduce the down-time of the edge exposure tool that would otherwise be caused by cleaning and calibration of the edge exposure lens.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.